Semiconductor Process Gas Monitoring Solution
In-situ monitoring of process gases with a time-of-flight high-resolution mass spectrometer!
The semiconductor process includes various steps such as crystal growth (epitaxial growth), film deposition (CVD, ALD), etching, and cleaning. Additionally, a variety of raw material gases are used in these processes. By monitoring the reaction products, decomposition products, and residual components in the process chamber in real-time, we can improve yield, enhance productivity, and contribute to the development of next-generation semiconductor technologies. The Kanomax 'infiTOF', a mass spectrometer with high resolution and real-time measurement capabilities, supports the research, development, and manufacturing of higher quality products. 【Solutions】 ■ Real-time measurement of process gases ■ Portability suitable for on-site measurements *For more details, please refer to the PDF document or feel free to contact us.
- 企業：カノマックスアナリティカル
- 価格：Other
